Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ion source with multiple bias electrodes

Ion source with multiple bias electrodes

US Patent 11545330 · Granted Jan 3, 2023

Estimated economic value: $33,972,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ion implantation system and method for implanting aluminum using non-fluorine-co2025
Shielded gas inlet for an ion source2025
High energy implanter with small footprint2025
High energy implanter with small footprint2025
Hydraulic feed system for an ion source2024
Hydraulic feed system for an ion source2024
Dual source injector with switchable analyzing magnet2024
Dual source injector with switchable analyzing magnet2024
Fluorine based molecular co-gas when running dimethylaluminum chloride as a sour2024
Dual source injector with switchable analyzing magnet2023
Dual source injector with switchable analyzing magnet2023
Extended lifetime dual indirectly-heated cathode ion source2023