Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5591676 | Method of making a semiconductor device having a low permittivity dielectric | Henry G. Hughes, Ping Lue | 1997-01-07 |
| 5442237 | Semiconductor device having a low permittivity dielectric | Henry G. Hughes, Ping Lue | 1995-08-15 |
| 5389793 | Apparatus and methods for ion implantation | Derek Aitken, Michael T. Wauk, II | 1995-02-14 |
| 5106471 | Reactive ion etch process for surface acoustic wave (SAW) device fabrication | Jeffrey L. Galvin, David Moon Yee | 1992-04-21 |
| 4801350 | Method for obtaining submicron features from optical lithography technology | Robert J. Mattox | 1989-01-31 |
| 4776744 | Systems and methods for wafer handling in semiconductor process equipment | Paul R. Stonestreet, Clive Allum, Bert Webber, Richard Cooke, Michael T. Wauk, II | 1988-10-11 |
| 4733091 | Systems and methods for ion implantation of semiconductor wafers | Michael T. Wauk, II | 1988-03-22 |
| 4340456 | Method for detecting the end point of a plasma etching reaction | Clarence J. Tracy | 1982-07-20 |
| 4201579 | Method for removing photoresist by hydrogen plasma | Clarence J. Tracy | 1980-05-06 |