Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8481959 | Apparatus and method for multi-directionally scanning a beam of charged particles | — | 2013-07-09 |
| 8399851 | Systems and methods for scanning a beam of charged particles | — | 2013-03-19 |
| 6679675 | Method and apparatus for processing wafers | Robert J. Mitchell, Keith Relleen | 2004-01-20 |
| 6555832 | Determining beam alignment in ion implantation using Rutherford Back Scattering | Geoffrey Ryding, Theodore H. Smick, Marvin Farley, Peter Rose | 2003-04-29 |
| 6525327 | Ion implanter and beam stop therefor | Robert J. Mitchell, Michael T. Wauk, II, Hilton F. Glavish, Peter Kindersley | 2003-02-25 |
| 6350097 | Method and apparatus for processing wafers | Robert J. Mitchell, Keith Relleen | 2002-02-26 |
| 6179921 | Backside gas delivery system for a semiconductor wafer processing system | Karl Leeser | 2001-01-30 |
| 5053627 | Apparatus for ion implantation | Michael Guerra | 1991-10-01 |
| 4812663 | Calorimetric dose monitor for ion implantation equipment | D. H. Douglas-Hamilton | 1989-03-14 |
| 4307406 | Multistyli recording systems | — | 1981-12-22 |