| 8481959 |
Apparatus and method for multi-directionally scanning a beam of charged particles |
— |
2013-07-09 |
| 8399851 |
Systems and methods for scanning a beam of charged particles |
— |
2013-03-19 |
| 6679675 |
Method and apparatus for processing wafers |
Robert J. Mitchell, Keith Relleen |
2004-01-20 |
| 6555832 |
Determining beam alignment in ion implantation using Rutherford Back Scattering |
Geoffrey Ryding, Theodore H. Smick, Marvin Farley, Peter Rose |
2003-04-29 |
| 6525327 |
Ion implanter and beam stop therefor |
Robert J. Mitchell, Michael T. Wauk, II, Hilton F. Glavish, Peter Kindersley |
2003-02-25 |
| 6350097 |
Method and apparatus for processing wafers |
Robert J. Mitchell, Keith Relleen |
2002-02-26 |
| 6179921 |
Backside gas delivery system for a semiconductor wafer processing system |
Karl Leeser |
2001-01-30 |
| 5053627 |
Apparatus for ion implantation |
Michael Guerra |
1991-10-01 |
| 4812663 |
Calorimetric dose monitor for ion implantation equipment |
D. H. Douglas-Hamilton |
1989-03-14 |
| 4307406 |
Multistyli recording systems |
— |
1981-12-22 |
