Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Systems and methods for scanning a beam of charged particles

Systems and methods for scanning a beam of charged particles

US Patent 8399851 · Granted Mar 19, 2013

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Apparatus and method for multi-directionally scanning a beam of charged particle2013
Method and apparatus for processing wafers2004
Determining beam alignment in ion implantation using Rutherford Back Scattering2003
Ion implanter and beam stop therefor2003
Method and apparatus for processing wafers2002
Backside gas delivery system for a semiconductor wafer processing system2001
Apparatus for ion implantation1991
Calorimetric dose monitor for ion implantation equipment1989
Multistyli recording systems1981