Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck design with improved chucking and arcing performance

Electrostatic chuck design with improved chucking and arcing performance

US Patent 12211728 · Granted Jan 28, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for deposition residue control2025
Forming a doped hardmask2025
Semiconductor processing system with a manifold for equal splitting and common d2025
Chamber configurations and processes for particle control2025
Chamber configurations and processes for particle control2025
Uniform in situ cleaning and deposition2025
Uniform in situ cleaning and deposition2025
Methods and apparatus for minimizing substrate backside damage2025
Methods and apparatus for minimizing substrate backside damage2025
Methods and apparatus for minimizing substrate backside damage2025
Multiple process semiconductor processing system2025
Methods to eliminate of deposition on wafer bevel and backside2025