Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424414 | Semiconductor processing system with a manifold for equal splitting and common divert architecture | Arun Chakravarthy Chakravarthy, Vinay Prabhakar, Hossein Rezvantalab | 2025-09-23 |
| 12012653 | Cleaning assemblies for substrate processing chambers | Yuxing Zhang, Tuan Nguyen, Amit Kumar BANSAL, Nitin Pathak, Saket Rathi +3 more | 2024-06-18 |
| 10903102 | Methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar +2 more | 2021-01-26 |
| 10510570 | Systems, apparatus, and methods for purging a substrate carrier at a factory interface | Subramaniam V. Iyer, Devendrappa Holeyannavar, Douglas MacLeod, Kenneth Carpenter, Naveen Kumar +2 more | 2019-12-17 |