Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process chamber with reduced plasma arc

Process chamber with reduced plasma arc

US Patent 11875969 · Granted Jan 16, 2024

Estimated economic value: $94,012,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Systems and methods for deposition residue control2025
Cleaning method, window wiping robot, and storage medium2025
Showerhead design to control stray deposition2025
Vacuum interrupter with slow opening solenoid core inside to shorten the length 2025
Semiconductor processing system with a manifold for equal splitting and common d2025
Chamber configurations and processes for particle control2025
Chamber configurations and processes for particle control2025
Chamber configurations and processes for particle control2025
Chamber configurations and processes for particle control2025
Chamber configurations and processes for particle control2025
Systems and methods of seasoning electrostatic chucks with dielectric seasoning 2025
Electrical gas lift valves and assemblies2025