Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400843 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Ganesh Balasubramanian, Vinay Prabhakar | 2025-08-26 |
| 12211673 | Processing chamber deposition confinement | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee | 2025-01-28 |
| 12191169 | Systems and methods for faceplate temperature control | Venkata Sharat Chandra Parimi, Runyun Pan | 2025-01-07 |
| 12136549 | Plasma-enhanced chemical vapor deposition of carbon hard-mask | Byung Seok KWON, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Vinay Prabhakar +3 more | 2024-11-05 |
| 12000048 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2024-06-04 |
| 11875969 | Process chamber with reduced plasma arc | Fei Wu, Abdul Aziz Khaja, Vinay Prabhakar, Ganesh Balasubramanian | 2024-01-16 |
| 11699577 | Treatment for high-temperature cleans | Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more | 2023-07-11 |
| 11670492 | Chamber configurations and processes for particle control | Fei Wu, Abdul Aziz Khaja, Ganesh Balasubramanian, Vinay Prabhakar | 2023-06-06 |
| 11600470 | Targeted heat control systems | Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Xiaoquan Min, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha +1 more | 2023-03-07 |
| 11584994 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more | 2023-02-21 |
| 11515129 | Radiation shield modification for improving substrate temperature uniformity | Elizabeth Neville, Satish Radhakrishnan, Kartik Shah, Vinay Prabhakar, Venkata Sharat Chandra Parimi | 2022-11-29 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2022-03-15 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2020-03-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10100408 | Edge hump reduction faceplate by plasma modulation | Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons, Ziqing Duan +5 more | 2018-10-16 |
| 7145913 | Thread based scalable routing for an active router | David William Craig, Hwangnam Kim, Sung-Wook Han, Constantine Polychronopoulos | 2006-12-05 |
| 7136353 | Quality of service management for multiple connections within a network communication system | Sung-Wook Han, Upamanyu Madhow, Tae-Eun Kim, Constantine Polychronopoulos | 2006-11-14 |
| 7099273 | Data transport acceleration and management within a network communication system | Sung-Wook Han, Tae-Eun Kim, Vaduvur Bharghavan, Upamanyu Madhow, Kannan Ramchandran | 2006-08-29 |