| 12400843 |
Chamber configurations and processes for particle control |
Fei Wu, Abdul Aziz Khaja, Ganesh Balasubramanian, Vinay Prabhakar |
2025-08-26 |
|
| 12211673 |
Processing chamber deposition confinement |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee |
2025-01-28 |
|
| 12191169 |
Systems and methods for faceplate temperature control |
Venkata Sharat Chandra Parimi, Runyun Pan |
2025-01-07 |
|
| 12136549 |
Plasma-enhanced chemical vapor deposition of carbon hard-mask |
Byung Seok KWON, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Vinay Prabhakar +3 more |
2024-11-05 |
$79,202,000 |
| 12000048 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more |
2024-06-04 |
$68,807,000 |
| 11875969 |
Process chamber with reduced plasma arc |
Fei Wu, Abdul Aziz Khaja, Vinay Prabhakar, Ganesh Balasubramanian |
2024-01-16 |
$94,012,000 |
| 11699577 |
Treatment for high-temperature cleans |
Sarah Michelle Bobek, Ruiyun Huang, Abdul Aziz Khaja, Amit Kumar BANSAL, Dong-Hyung LEE +6 more |
2023-07-11 |
$39,838,000 |
| 11670492 |
Chamber configurations and processes for particle control |
Fei Wu, Abdul Aziz Khaja, Ganesh Balasubramanian, Vinay Prabhakar |
2023-06-06 |
$40,761,000 |
| 11600470 |
Targeted heat control systems |
Venkata Sharat Chandra Parimi, Satish Radhakrishnan, Xiaoquan Min, Sarah Michelle Bobek, Prashant Kumar Kulshreshtha +1 more |
2023-03-07 |
$32,704,000 |
| 11584994 |
Pedestal for substrate processing chambers |
Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee +1 more |
2023-02-21 |
$24,540,000 |
| 11515129 |
Radiation shield modification for improving substrate temperature uniformity |
Elizabeth Neville, Satish Radhakrishnan, Kartik Shah, Vinay Prabhakar, Venkata Sharat Chandra Parimi |
2022-11-29 |
$23,914,000 |
| 11276562 |
Plasma processing using multiple radio frequency power feeds for improved uniformity |
Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more |
2022-03-15 |
$44,583,000 |
| 10580623 |
Plasma processing using multiple radio frequency power feeds for improved uniformity |
Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more |
2020-03-03 |
$21,905,000 |
| 10403535 |
Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system |
Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more |
2019-09-03 |
$20,988,000 |
| 10100408 |
Edge hump reduction faceplate by plasma modulation |
Kwangduk Douglas Lee, Ganesh Balasubramanian, Juan Carlos Rocha-Alvarez, Martin Jay Seamons, Ziqing Duan +5 more |
2018-10-16 |
$21,789,000 |
| 7145913 |
Thread based scalable routing for an active router |
David William Craig, Hwangnam Kim, Sung-Wook Han, Constantine Polychronopoulos |
2006-12-05 |
|
| 7136353 |
Quality of service management for multiple connections within a network communication system |
Sung-Wook Han, Upamanyu Madhow, Tae-Eun Kim, Constantine Polychronopoulos |
2006-11-14 |
|
| 7099273 |
Data transport acceleration and management within a network communication system |
Sung-Wook Han, Tae-Eun Kim, Vaduvur Bharghavan, Upamanyu Madhow, Kannan Ramchandran |
2006-08-29 |
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