Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Jay D. Pinson, II, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2022-03-15 |
| 11107704 | Gas input system for a substrate processing chamber | Tejas Ulavi, Amit Kumar BANSAL | 2021-08-31 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Jay D. Pinson, II, Hiroji Hanawa, Juan Carlos Rocha-Alvarez +4 more | 2020-03-03 |
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Praket P. Jha, Masaki Ogata, Zhijun Jiang +6 more | 2019-04-30 |