Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods, systems, and apparatus for optically monitoring individual lamps

Methods, systems, and apparatus for optically monitoring individual lamps

US Patent 11562915 · Granted Jan 24, 2023

Estimated economic value: $45,726,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Methods of selective oxidation on rapid thermal processing (RTP) chamber with ac2025
Temperature profile measurement and synchronized control on substrate and suscep2025
Lamp filament having a pitch gradient and method of making2025
Rotatable thermal processing chamber2024
Apparatus for rotating substrates2024
Substrate processing monitoring2024
Pyrometry error detection sensor for RTP temperature control system2024
Algorithm for accurately converting a wide range of photo signals into an electr2024
Etalon thermometry for plasma environments2024
Conical coil for rapid thermal anneal lamps2024
Selective oxidation on rapid thermal processing (RTP) chamber with active steam 2024
Fast response pedestal assembly for selective preclean2024