Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Conical coil for rapid thermal anneal lamps

Conical coil for rapid thermal anneal lamps

US Patent 12027388 · Granted Jul 2, 2024

Estimated economic value: $85,126,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate support with real time force and film stress control2025
Heated substrate support2025
Temperature profile measurement and synchronized control on substrate and suscep2025
Lamp filament having a pitch gradient and method of making2025
Substrate support designs for a deposition chamber2025
Substrate support designs for a deposition chamber2025
Substrate processing monitoring2024
Algorithm for accurately converting a wide range of photo signals into an electr2024
High power tungsten halogen lamp lifetime improvement through J-hook design2024
Substrate support with real time force and film stress control2024
High power tungsten halogen lamp lifetime improvement through J-hook design2024
Apparatus and method for inspecting lamps2023