Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9814099 | Substrate support with surface feature for reduced reflection and manufacturing techniques for producing same | Shu-Kwan LAU, Joseph M. Ranish, Paul Brillhart | 2017-11-07 |
| 9768043 | Quartz upper and lower domes | Anzhong Chang, Paul Brillhart, Surajit Kumar, Satheesh Kuppurao, David K. Carlson +9 more | 2017-09-19 |
| 9748121 | Thermal coupled quartz dome heat sink | Joseph M. Ranish, Paul Brillhart | 2017-08-29 |
| 9695508 | Liner assembly for chemical vapor deposition chamber | David K. Carlson, Nyi O. Myo | 2017-07-04 |
| 9580835 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2017-02-28 |
| 9553002 | Flow controlled liner having spatially distributed gas passages | Shu-Kwan LAU | 2017-01-24 |
| 9532401 | Susceptor support shaft with uniformity tuning lenses for EPI process | Zhepeng CONG, Balasubramanian Ramachandran, Masato Ishii, Xuebin Li, Shu-Kwan LAU +1 more | 2016-12-27 |
| 9499905 | Methods and apparatus for the deposition of materials on a substrate | Nyi O. Myo | 2016-11-22 |
| 9322097 | EPI base ring | Steve Aboagye, Paul Brillhart, Surajit Kumar, Anzhong Chang, Satheesh Kuppurao +1 more | 2016-04-26 |
| 9279604 | Compact ampoule thermal management system | David K. Carlson, Errol Antonio C. Sanchez, Kenric Choi, Marcel E. Josephson, Dennis L. Demars +1 more | 2016-03-08 |
| 9230837 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2016-01-05 |
| 9123765 | Susceptor support shaft for improved wafer temperature uniformity and process repeatability | Shu-Kwan LAU | 2015-09-01 |
| 8980005 | Liner assembly for chemical vapor deposition chamber | David K. Carlson, Nyi O. Myo | 2015-03-17 |
| D717746 | Lower chamber liner | Shu-Kwan LAU | 2014-11-18 |
| D716239 | Upper chamber liner | Shu-Kwan LAU | 2014-10-28 |
| D716240 | Lower chamber liner | Shu-Kwan LAU, Anzhong Chang, Paul Brillhart, Richard O. Collins | 2014-10-28 |
| D711331 | Upper chamber liner | Shu-Kwan LAU, Anzhong Chang, Paul Brillhart, Richard O. Collins | 2014-08-19 |
| 8772055 | Multizone control of lamps in a conical lamphead using pyrometers | Joseph M. Ranish, Paul Brillhart, Jose Antonio Marin, Satheesh Kuppurao, Balasubramanian Ramachandran +1 more | 2014-07-08 |