Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417890 | Methods, systems, and apparatus for monitoring radiation output of lamps | Ashur J. ATANOS, Khokan Chandra Paul, Tao SHENG | 2025-09-16 |
| 12398462 | Process chamber | — | 2025-08-26 |
| 12400904 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2025-08-26 |
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhiyuan Ye, Avinash Shervegar, Enle CHOO, Ala Moradian | 2025-08-12 |
| 12371776 | Overlap susceptor and preheat ring | Schubert S. Chu, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2025-07-29 |
| 12354855 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Ala Moradian, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-07-08 |
| 12270752 | EPI self-heating sensor tube as in-situ growth rate sensor | Tao SHENG, Ashur J. ATANOS | 2025-04-08 |
| 12243761 | Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging | Martin Jeffrey Salinas, Hui Chen, Xinning LUAN, Ashur J. ATANOS | 2025-03-04 |
| 12221696 | Process kits and related methods for processing chambers to facilitate deposition process adjustability | Ala Moradian, Tao SHENG, Nimrod SMITH, Ashur J. ATANOS, Vinh N. TRAN | 2025-02-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Flora Fong-Song CHANG +10 more | 2025-01-14 |
| 12170213 | Flat pocket susceptor design with improved heat transfer | Nyi O. Myo | 2024-12-17 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Flora Fong-Song CHANG +10 more | 2024-12-10 |
| 12077880 | In-situ film growth rate monitoring apparatus, systems, and methods for substrate processing | Nyi O. Myo, Tao SHENG, Yong-Ping Zheng | 2024-09-03 |
| 11948818 | Temperature calibration with deposition and etch process | Tao SHENG, Vinh N. TRAN | 2024-04-02 |
| 11848226 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2023-12-19 |
| 11848202 | Growth monitor system and methods for film deposition | Mostafa BAGHBANZADEH, Tao SHENG, Enle CHOO | 2023-12-19 |
| 11815401 | Temperature calibration with band gap absorption method | Schubert S. Chu, Nyi O. Myo | 2023-11-14 |
| 11781212 | Overlap susceptor and preheat ring | Schubert S. Chu, Nyi O. Myo, Kartik Shah, Zhiyuan Ye, Richard O. Collins | 2023-10-10 |
| 11359972 | Temperature calibration with band gap absorption method | Schubert S. Chu, Nyi O. Myo | 2022-06-14 |
| 11057963 | Lamp infrared radiation profile control by lamp filament design and positioning | Schubert S. Chu | 2021-07-06 |
| 11021790 | Liner for processing chamber | Schubert S. Chu, Nyi O. Myo, Kartik Shah, Surajit Kumar | 2021-06-01 |
| 10930543 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2021-02-23 |
| 10269614 | Susceptor design to reduce edge thermal peak | Schubert S. Chu, Kartik Shah, Anhthu Ngo, Karthik Ramanathan, Nitin Pathak +8 more | 2019-04-23 |
| 10062598 | Thermal processing susceptor | Anhthu Ngo, Zuoming ZHU, Balasubramanian Ramachandran, Paul Brillhart, Edric Tong +10 more | 2018-08-28 |
| 9959610 | System and method to detect substrate and/or substrate support misalignment using imaging | Leonid M. Tertitski, Schubert S. Chu, Shay Assaf, Kim Vellore | 2018-05-01 |