Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12385159 | In-situ epi growth rate control of crystal thickness micro-balancing sensor | Zhepeng CONG, Zhiyuan Ye, Enle CHOO, Ala Moradian | 2025-08-12 |
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Tsutomu Tanaka, Alexander V. Garachtchenko, Dmitry A. Dzilno, Kallol Bera +3 more | 2023-11-21 |