Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12195851 | Thin layer deposition with plasma pulsing | Cong Trinh, Maribel Maldonado-Garcia, Mihaela Balseanu, Tsutomu Tanaka | 2025-01-14 |
| 12198908 | Magnetically coupled RF filter for substrate processing chambers | Edward P. Hammond, IV, Dmitry A. Dzilno | 2025-01-14 |
| 12084771 | Control of liquid delivery in auto-refill systems | Zohreh Razavi Hesabi, Cong Trinh, Kevin Griffin, Kenric Choi, Vipin Jose +3 more | 2024-09-10 |
| 11823871 | Microwave plasma source for spatial plasma enhanced atomic layer deposition (PE-ALD) processing tool | Jozef Kudela, Tsutomu Tanaka, Dmitry A. Dzilno, Avinash Shervegar, Kallol Bera +3 more | 2023-11-21 |
| 11776793 | Plasma source with ceramic electrode plate | Robert B. Moore, Jared Ahmad Lee, Marc Shull, Tsutomu Tanaka, Dmitry A. Dzilno | 2023-10-03 |
| 11081318 | Geometrically selective deposition of dielectric films utilizing low frequency bias | Kenichi Ohno, Keiichi Tanaka, Li-Qun Xia, Tsutomu Tanaka, Dmitry A. Dzilno +4 more | 2021-08-03 |
| 10854428 | Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage | Tsutomu Tanaka, Dmitry A. Dzilno, Keiichi Tanaka | 2020-12-01 |
| 6745095 | Detection of process endpoint through monitoring fluctuation of output data | Yuval Ben-Dov, Moshe Sarfaty | 2004-06-01 |
| 5963097 | Low-noise amplifier | Samuel Suresh Martin | 1999-10-05 |