Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12297559 | Method and apparatus for low temperature selective epitaxy in a deep trench | Abhishek Dube, Xuebin Li, Hua Chung | 2025-05-13 |
| 12249626 | Arsenic diffusion profile engineering for transistors | Patricia M. Liu, Zhiyuan Ye | 2025-03-11 |
| 12196617 | Temperature profile measurement and synchronized control on substrate and susceptor in an epitaxy chamber | Zuoming ZHU, Shu-Kwan LAU, Enle CHOO, Ala Moradian, Maxim D. SHAPOSHNIKOV +10 more | 2025-01-14 |
| 12165934 | Substrate processing monitoring | Zuoming ZHU, Shu-Kwan LAU, Ala Moradian, Enle CHOO, Vilen K. NESTOROV +10 more | 2024-12-10 |
| 11261538 | In-situ temperature mapping for epi chamber | Ala Moradian, Zuoming ZHU, Patricia M. Liu, Shu-Kwan LAU, Enle CHOO +1 more | 2022-03-01 |
| 11195914 | Transistor and method for forming a transistor | Patricia M. Liu, Zhiyuan Ye | 2021-12-07 |
| 10504723 | Method and apparatus for selective epitaxy | Xuebin Li, Hua Chung, Schubert S. Chu, Abhishek Dube | 2019-12-10 |
| 10276688 | Selective process for source and drain formation | Xinyu BAO, Zhiyuan Ye, Abhishek Dube, Xuebin Li, Errol Antonio C. Sanchez +2 more | 2019-04-30 |
| 9923081 | Selective process for source and drain formation | Xinyu BAO, Zhiyuan Ye, Abhishek Dube, Xuebin Li, Errol Antonio C. Sanchez +2 more | 2018-03-20 |