Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278110 | Bias voltage modulation approach for SiO/SiN layer alternating etch process | Sean S. Kang, Olivier Luere, Kenji Takeshita, Sanghyuk CHOI, Mengnan ZOU | 2025-04-15 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278110 | Bias voltage modulation approach for SiO/SiN layer alternating etch process | Sean S. Kang, Olivier Luere, Kenji Takeshita, Sanghyuk CHOI, Mengnan ZOU | 2025-04-15 |