Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7838434 | Method of plasma etching of high-K dielectric materials | Padmapani Nallan, Ajay Kumar | 2010-11-23 |
| 7368394 | Etch methods to form anisotropic features for high aspect ratio applications | Meihua Shen, Uwe Leucke, Xikun Wang, Wei Liu, Scott Williams | 2008-05-06 |
| 7217665 | Method of plasma etching high-K dielectric materials with high selectivity to underlying layers | Padmapani Nallan, Ajay Kumar | 2007-05-15 |
| 7094704 | Method of plasma etching of high-K dielectric materials | Padmapani Nallan, Ajay Kumar | 2006-08-22 |
| 6893893 | Method of preventing short circuits in magnetic film stacks | Padmapani Nallan, Ajay Kumar, Jeng H. Hwang, Ralph Kerns | 2005-05-17 |
| 6821907 | Etching methods for a magnetic memory cell stack | Jeng H. Hwang, Xiaoyi Chen | 2004-11-23 |
| 6806095 | Method of plasma etching of high-K dielectric materials with high selectivity to underlying layers | Padmapani Nallan, Ajay Kumar | 2004-10-19 |
| 6767824 | Method of fabricating a gate structure of a field effect transistor using an alpha-carbon mask | Padmapani Nallan, Ajay Kumar, Wei Liu | 2004-07-27 |
| 6730561 | Method of forming a cup capacitor | Jeng H. Hwang | 2004-05-04 |
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, James S. Papanu, Mark Kawaguchi, Harald Herchen, Jeng H. Hwang +1 more | 2004-02-17 |
| 6368517 | Method for preventing corrosion of a dielectric material | Jeng H. Hwang, Kang-Lie Chiang | 2002-04-09 |