Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6692903 | Substrate cleaning apparatus and method | James S. Papanu, Mark Kawaguchi, Harald Herchen, Jeng H. Hwang, Guangxiang Jin +1 more | 2004-02-17 |
HC
Haojiang Chen — 1 Patent
Overall (All Time): #3,470,297 of 4,157,543Top 85%
1
Patents All Time