| 7186657 |
Method for patterning HfO2-containing dielectric |
Wei-Tsun Shiau, Chien-Ting Lin, Jiunn-Ren Hwang |
2007-03-06 |
| 6919168 |
Masking methods and etching sequences for patterning electrodes of high density RAM capacitors |
Steve S. Y. Mak, True-Lon Lin, Chentsau Ying, John W. Schaller |
2005-07-19 |
| 6893893 |
Method of preventing short circuits in magnetic film stacks |
Padmapani Nallan, Ajay Kumar, Guangxiang Jin, Ralph Kerns |
2005-05-17 |
| 6821907 |
Etching methods for a magnetic memory cell stack |
Guangxiang Jin, Xiaoyi Chen |
2004-11-23 |
| 6777342 |
Method of plasma etching platinum |
— |
2004-08-17 |
| 6770567 |
Method of reducing particulates in a plasma etch chamber during a metal etch process |
Yong Deuk Ko, Se Jin Oh, Chan Ouk Jung |
2004-08-03 |
| 6749770 |
Method of etching an anisotropic profile in platinum |
Chentsau Ying, Kang-Lie Chiang, Steve S. Y. Mak |
2004-06-15 |
| 6730561 |
Method of forming a cup capacitor |
Guangxiang Jin |
2004-05-04 |
| 6709609 |
Plasma heating of a substrate with subsequent high temperature etching |
Xiaoyi Chen |
2004-03-23 |
| 6692903 |
Substrate cleaning apparatus and method |
Haojiang Chen, James S. Papanu, Mark Kawaguchi, Harald Herchen, Guangxiang Jin +1 more |
2004-02-17 |
| 6692648 |
Method of plasma heating and etching a substrate |
Xiaoyi Chen |
2004-02-17 |
| 6579796 |
Method of etching platinum using a silicon carbide mask |
Chentsau Ying, Luc Van Autryve |
2003-06-17 |
| 6541380 |
Plasma etching process for metals and metal oxides, including metals and metal oxides inert to oxidation |
Chentsau Ying |
2003-04-01 |
| 6482745 |
Etching methods for anisotropic platinum profile |
— |
2002-11-19 |
| 6436838 |
Method of patterning lead zirconium titanate and barium strontium titanate |
Chen Tsan Ying, Hideyuki Yamauchi, Seayoul Park, Yohei Kawase |
2002-08-20 |
| 6368517 |
Method for preventing corrosion of a dielectric material |
Kang-Lie Chiang, Guangxiang Jin |
2002-04-09 |
| 6323132 |
Etching methods for anisotropic platinum profile |
Chentsau Ying, Kang-Lie Chiang, Steve S. Y. Mak |
2001-11-27 |
| 6277251 |
Apparatus and method for shielding a dielectric member to allow for stable power transmission into a plasma processing chamber |
Steve S. Y. Mak, Yan Ye |
2001-08-21 |
| 6277762 |
Method for removing redeposited veils from etched platinum |
— |
2001-08-21 |
| 6270687 |
RF plasma method |
Yan Ye, Donald Olgado, Avi Tepman, Diana Xiaobing Ma, Gerald Yin +2 more |
2001-08-07 |
| 6265318 |
Iridium etchant methods for anisotropic profile |
Chentsau Ying, Guang Xiang Jin, Steve S. Y. Mak |
2001-07-24 |
| 6087265 |
Method for removing redeposited veils from etched platinum |
— |
2000-07-11 |
| 6071372 |
RF plasma etch reactor with internal inductive coil antenna and electrically conductive chamber walls |
Yan Ye, Donald Olgado, Avi Tepman, Diana Xiaobing Ma, Gerald Yin +2 more |
2000-06-06 |
| 6037264 |
Method for removing redeposited veils from etched platinum |
— |
2000-03-14 |
| 5174856 |
Method for removal of photoresist over metal which also removes or inactivates corrosion-forming materials remaining from previous metal etch |
Steve Mak |
1992-12-29 |
