Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770567 | Method of reducing particulates in a plasma etch chamber during a metal etch process | Yong Deuk Ko, Se Jin Oh, Jeng H. Hwang | 2004-08-03 |
| 6177320 | Method for forming a self aligned contact in a semiconductor device | Chang-Hyun Cho, Hong-Sik Jeong, Jae-Goo Lee, Chang-Jin Kang, Sang-Sup Jeong +1 more | 2001-01-23 |
| 6159811 | Methods for patterning microelectronic structures using chlorine, oxygen, and fluorine | Hwa-Sook Shin, Kyeong-Koo Chi | 2000-12-12 |
| 6087264 | Methods for patterning microelectronic structures using chlorine and oxygen | Hwa-Sook Shin, Kyeong-Koo Chi | 2000-07-11 |
| 5903351 | Method and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamber | Sang-Sup Jeong, Kyeong-Koo Chi | 1999-05-11 |