Issued Patents All Time
Showing 1–25 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484215 | Sulfur and fluorine containing etch chemistry for improvement of distortion and bow control for har etch | Sanghyuk CHOI, Joseph James VEGH | 2016-11-01 |
| 8941165 | Methods of fabricating integrated circuit capacitors having u-shaped lower capacitor electrodes | Sung-Il Cho, Seung-Young Son, Chang-Jin Kang, Ji-Chul Shin | 2015-01-27 |
| 8906194 | Ultra-high aspect ratio dielectric etch | Erik A. Edelberg | 2014-12-09 |
| 8501627 | Profile control in dielectric etch | Jonathan Kim | 2013-08-06 |
| 8470715 | CD bias loading control with ARC layer open | Jonathan Kim | 2013-06-25 |
| 8158524 | Line width roughness control with arc layer open | Jonathan Kim | 2012-04-17 |
| 7763544 | Method of forming fine pattern of semiconductor device using sige layer as sacrificial layer, and method of forming self-aligned contacts using the same | Keun-Hee Bai, Chang-Jin Kang, Cheol-Kyu Lee | 2010-07-27 |
| 7736970 | Method of fabricating semiconductor device having capacitor | Sung-Il Cho, Seung-Young Son, Chang-Jin Kang, Ji-Chul Shin | 2010-06-15 |
| 7709389 | Method of fabricating a semiconductor device | Dong Chan Kim, Chang-Jin Kang | 2010-05-04 |
| 7709346 | Semiconductor device with trench gate type transistor and method of manufacturing the same | Yong Jin Kim, Chang-Jin Kang, Hyoung-sub Kim, Mybong-Cheol Kim, Tae-Rin Chung +2 more | 2010-05-04 |
| 7682986 | Ultra-high aspect ratio dielectric etch | Erik A. Edelberg | 2010-03-23 |
| 7566659 | Method of forming fine pattern of semiconductor device using SiGe layer as sacrificial layer, and method of forming self-aligned contacts using the same | Keun-Hee Bai, Chang-Jin Kang, Cheol-Kyu Lee | 2009-07-28 |
| 7547636 | Pulsed ultra-high aspect ratio dielectric etch | Erik A. Edelberg | 2009-06-16 |
| 7540970 | Methods of fabricating a semiconductor device | Cha-Won Koh, Sang-Gyun Woo, Jeong-Lim Nam, Seok-Hwan Oh, Gi-Sung Yeo +2 more | 2009-06-02 |
| 7510934 | Methods of fabricating nonvolatile memory devices | Seung-Pil Chung, Jong-Ho Park, Dong Hyun Kim | 2009-03-31 |
| 7491344 | Method for etching an object using a plasma and an object etched by a plasma | Heung-Sik Park, Chang-Jin Kang, Tae-hyuk Ahn, Sang-Hun Seo | 2009-02-17 |
| 7479445 | Methods of forming field effect transistors having t-shaped gate electrodes using carbon-based etching masks | Dong Chan Kim, Chang-Jin Kang, Sung Hoon Chung | 2009-01-20 |
| 7402488 | Method of manufacturing a semiconductor memory device | Sung-Il Cho, Seung-Pil Chung, Chang-Jin Kang, Cheol-Kyu Lee | 2008-07-22 |
| 7384843 | Method of fabricating flash memory device including control gate extensions | Dong Chan Kim, Chang-Jin Kang, Seung-Pil Chung | 2008-06-10 |
| 7338849 | Methods of fabricating flash memory devices and flash memory devices fabricated thereby | Dong Chan Kim, Chang-Jin Kang, Dong Hyun Kim | 2008-03-04 |
| 7329574 | Methods of forming capacitor electrodes using fluorine and oxygen | Sung-Il Cho, Jong Kyu Kim, Byeong-yun Nam, Cheol-Kyu Lee | 2008-02-12 |
| 7319255 | Semiconductor device including a metal gate electrode formed in a trench and method of forming thereof | Sung-Wook Hwang, Chang-Jin Kang, Sung Hoon Chung | 2008-01-15 |
| 7303957 | Method of fabricating a flash memory device | Seung-Pil Chung, Chang-Jin Kang, Jai-Hyuk Song | 2007-12-04 |
| 7291531 | Method of fabricating semiconductor device having capacitor | Sung-Il Cho, Seung-Young Son, Chang-Jin Kang, Ji-Chul Shin | 2007-11-06 |
| 7258811 | Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage | Chang-Woong Chu, Ji Soo Kim, Seung-Pil Chung, Sang-Hun Seo | 2007-08-21 |