Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7256143 | Semiconductor device having self-aligned contact plug and method for fabricating the same | Myeong-Cheol Kim, Chang-Jin Kang, Seung-Young Son | 2007-08-14 |
| 7247540 | Methods of forming field effect transistors having recessed channel regions | Sung Hoon Chung, Byeong-yun Nam | 2007-07-24 |
| 7242054 | Nonvolatile memory devices | Seung-Pil Chung, Jong-Ho Park, Dong Hyun Kim | 2007-07-10 |
| 7183600 | Semiconductor device with trench gate type transistor and method of manufacturing the same | Yong Jin Kim, Chang-Jin Kang, Hyoung-sub Kim, Myeong-Cheol Kim, Tae-Rin Chung +2 more | 2007-02-27 |
| 7125766 | Method of forming capacitor for semiconductor device | Dong Chan Kim, Chang-Jin Kang, Byeong-yun Nam | 2006-10-24 |
| 7118926 | Method of optimizing seasoning recipe for etch process | Hong-Je Cho, Chang-Jin Kang, Cheol-Kyu Lee, Hye Jin Jo | 2006-10-10 |
| 7098135 | Semiconductor device including bit line formed using damascene technique and method of fabricating the same | Seung-Pil Chung, Chang-Jin Kang, Jeong-sic Jeon, Seung-Young Son, Sang-Yong Kim | 2006-08-29 |
| 7052952 | Method for forming wire line by damascene process using hard mask formed from contacts | In Deog BAE, Chang-Jin Kang, Jeong-sic Jeon | 2006-05-30 |
| 6875690 | Semiconductor device having self-aligned contact plug and method for fabricating the same | Myeong-Cheol Kim, Chang-Jin Kang, Seung-Young Son | 2005-04-05 |
| 6867096 | Method of fabricating semiconductor device having capacitor | Sung-Il Cho, Seung-Young Son, Chang-Jin Kang, Ji-Chul Shin | 2005-03-15 |
| 6855597 | DRAM cell | Chul-Ho Shin | 2005-02-15 |
| 6793767 | Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage | Chang-Woong Chu, Ji Soo Kim, Seung-Pil Chung, Sang-Hun Seo | 2004-09-21 |
| 6767834 | Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module | Seung-Pil Chung, Ji Soo Kim, Chang-Woong Chu, Sang-Hun Seo | 2004-07-27 |
| 6607954 | Methods of fabricating cylinder-type capacitors for semiconductor devices using a hard mask and a mold layer | Jeong-sic Jeon, Chang-Jin Kang, Jin-hwan Hahm | 2003-08-19 |
| 6570205 | DRAM cell | Chul-Ho Shin | 2003-05-27 |
| 6562651 | Method of manufacturing a semiconductor device having contact pads | Seung-Pil Chung, Jung-Sik Jeon | 2003-05-13 |
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system | Sang-Hun Seo, Ji Soo Kim, Chang-Woong Chu, Seung-Pil Chung | 2003-03-18 |
| 6498081 | Method of manufacturing self-aligned contact hole | Byeong-yun Nam | 2002-12-24 |
| 6159811 | Methods for patterning microelectronic structures using chlorine, oxygen, and fluorine | Hwa-Sook Shin, Chan Ouk Jung | 2000-12-12 |
| 6087264 | Methods for patterning microelectronic structures using chlorine and oxygen | Hwa-Sook Shin, Chan Ouk Jung | 2000-07-11 |
| 5932492 | Methods for forming alumina masking | Jin-hwan Hahm | 1999-08-03 |
| 5914276 | Methods of forming electrically conductive lines using nitrogen and chlorine containing gas mixtures | Hwa-Sook Shin | 1999-06-22 |
| 5903351 | Method and apparatus for selective spectroscopic analysis of a wafer surface and gas phase elements in a reaction chamber | Sang-Sup Jeong, Chan Ouk Jung | 1999-05-11 |
| 5863841 | Plasma diffusion control apparatus | — | 1999-01-26 |
| 5859501 | Radio frequency generating systems and methods for forming pulse plasma using gradually pulsed time-modulated radio frequency power | — | 1999-01-12 |