Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10553406 | Plasma generating apparatus and substrate processing apparatus | Hong-Young Chang, Yun Seong Lee | 2020-02-04 |
| 7491344 | Method for etching an object using a plasma and an object etched by a plasma | Heung-Sik Park, Chang-Jin Kang, Tae-hyuk Ahn, Kyeong-Koo Chi | 2009-02-17 |
| 7258811 | Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage | Chang-Woong Chu, Kyeong-Koo Chi, Ji Soo Kim, Seung-Pil Chung | 2007-08-21 |
| 6855590 | Method of manufacturing the semiconductor device intended to prevent a leakage current from occuring due to a gate induced drain leakage effect | Seung Hyun Park, Han-Sin Lee, Moo-Sung Kim, Won-Suk Yang | 2005-02-15 |
| 6793767 | Wafer stage including electrostatic chuck and method for dechucking wafer using the wafer stage | Chang-Woong Chu, Kyeong-Koo Chi, Ji Soo Kim, Seung-Pil Chung | 2004-09-21 |
| 6767834 | Method of manufacturing a contact of a semiconductor device using cluster apparatus having at least one plasma pretreatment module | Seung-Pil Chung, Kyeong-Koo Chi, Ji Soo Kim, Chang-Woong Chu | 2004-07-27 |
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system | Kyeong-Koo Chi, Ji Soo Kim, Chang-Woong Chu, Seung-Pil Chung | 2003-03-18 |
| 6465346 | Conducting line of semiconductor device and manufacturing method thereof using aluminum oxide layer as hard mask | Ji Soo Kim, Wan Jae Park, Chang-Woong Chu | 2002-10-15 |