Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484215 | Sulfur and fluorine containing etch chemistry for improvement of distortion and bow control for har etch | Sanghyuk CHOI, Kyeong-Koo Chi | 2016-11-01 |
| 8828744 | Method for etching with controlled wiggling | Yungho Noh | 2014-09-09 |