Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450976 | Ground bar and method of grounding | — | 2022-09-20 |
| D904306 | Ground bar | — | 2020-12-08 |
| 10770321 | Process kit erosion and service life prediction | Kang-Lie Chiang, Pallavi Zhang, Michael D. Armacost, Nitin Khurana | 2020-09-08 |
| 10177018 | Process kit erosion and service life prediction | Kang-Lie Chiang, Pallavi Zhang, Michael D. Armacost, Nitin Khurana | 2019-01-08 |
| 5716484 | Contaminant reduction improvements for plasma etch chambers | Joseph Kava, Richard McGovern, Yan Rozenzon | 1998-02-10 |
| 5693179 | Contaminant reduction improvements for plasma etch chambers | Joseph Kava, Richard McGovern, Yan Rozenzon | 1997-12-02 |
| 5484486 | Quick release process kit | Donald L. Johnson, Richard McGovern, Yan Rozenzon | 1996-01-16 |
| 5480052 | Domed extension for process chamber electrode | Michael G. Furr, Joseph Kava, Richard McGovern | 1996-01-02 |
| 5474649 | Plasma processing apparatus employing a textured focus ring | Joseph Kava, Richard McGovern | 1995-12-12 |