Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770321 | Process kit erosion and service life prediction | Kang-Lie Chiang, Greg Blackburn, Michael D. Armacost, Nitin Khurana | 2020-09-08 |
| 10541169 | Method and system for balancing the electrostatic chucking force on a substrate | Chong Jiang, Lei Jing, Mingte Liu, Adolph Miller Allen, Michael W. Johnson +1 more | 2020-01-21 |
| 10332773 | Transparent electrostatic carrier | Leung Kway Lee, Michael S. Cox | 2019-06-25 |
| 10177018 | Process kit erosion and service life prediction | Kang-Lie Chiang, Greg Blackburn, Michael D. Armacost, Nitin Khurana | 2019-01-08 |