| 7186943 |
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression |
Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more |
2007-03-06 |
| 7132618 |
MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression |
Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more |
2006-11-07 |
| 7030335 |
Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression |
Daniel J. Hoffman, Gerald Yin, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr. +3 more |
2006-04-18 |
| 6900596 |
Capacitively coupled plasma reactor with uniform radial distribution of plasma |
Jang-Gyoo Yang, Daniel J. Hoffman, James D. Carducci, Douglas A. Buchberger, Jr., Matthew L. Miller +2 more |
2005-05-31 |
| 6894245 |
Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppression |
Daniel J. Hoffman, Yan Ye, Dan Katz, Douglas A. Buchberger, Jr., Xiaoye Zhao +2 more |
2005-05-17 |
| 6677712 |
Gas distribution plate electrode for a plasma receptor |
Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Xiaoye Zhao, Ananda H. Kumar +3 more |
2004-01-13 |
| 6667577 |
Plasma reactor with spoke antenna having a VHF mode with the spokes in phase |
Steven C. Shannon, Daniel J. Hoffman, Chunshi Cui, Yan Ye, Gerardo Delgadino +4 more |
2003-12-23 |
| 6586886 |
Gas distribution plate electrode for a plasma reactor |
Dan Katz, Douglas A. Buchberger, Jr., Yan Ye, Xiaoye Zhao, Ananda H. Kumar +3 more |
2003-07-01 |
