PS

Palani Sakthivel

AT Axcelis Technologies: 7 patents #35 of 300Top 15%
EA Eaton: 1 patents #1,900 of 3,708Top 55%
Overall (All Time): #656,948 of 4,157,543Top 20%
8
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7709814 Apparatus and process for treating dielectric materials Carlo Waldfried, Christopher Garmer, Orlando Escorcia, Ivan L. Berry, III, Alan C. Janos 2010-05-04
6951823 Plasma ashing process Carlo Waldfried, Orlando Escorcia, Qingyuan Han, Thomas Buckley 2005-10-04
6638875 Oxygen free plasma stripping process Qingyan Han, Ivan L. Berry, III, Ricky Ruffin, Mahmoud Dahimene 2003-10-28
6630406 Plasma ashing process Carlo Waldfried, Ivan L. Berry, III, Orlando Escorcia, Qingyuan Han 2003-10-07
6548416 Plasma ashing process Qingyuan Han, Ivan L. Berry, III, Carlo Waldfried 2003-04-15
6524936 Process for removal of photoresist after post ion implantation John Scott Hallock, Alan F. Becknell 2003-02-25
6492186 Method for detecting an endpoint for an oxygen free plasma process Qingyan Han, Ricky Ruffin, Andre Cardoso 2002-12-10
6281135 Oxygen free plasma stripping process Qingyuan Han, Ivan L. Berry, III, Ricky Ruffin, Mammoud Dahimene 2001-08-28