Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580076 | Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith | Thomas Buckley, David Ferris, Richard E. Pingree, Jr., Palanikumaran Sakthivel, Aseem K. Srivastava +1 more | 2013-11-12 |
| 7449416 | Apparatus and plasma ashing process for increasing photoresist removal rate | Philip Hammar, David Ferris | 2008-11-11 |
| 7381651 | Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing process | Palanikumaran Sakthivel, Thomas Buckley | 2008-06-03 |
| 6524936 | Process for removal of photoresist after post ion implantation | John Scott Hallock, Palani Sakthivel | 2003-02-25 |
| 5981147 | Stable, ionomeric photoresist emulsion and process of preparation and use thereof | John Scott Hallock, Cynthia L. Ebner, Daniel J. Hart | 1999-11-09 |
| 5508141 | Autodeposition emulsion and methods of using thereof to selectively protect metallic surfaces | Daniel J. Hart, Betsy Elzufon, John Scott Hallock, Alan R. Browne | 1996-04-16 |
| 5232815 | Autodeposition emulsion and methods of using thereof to selectively protect metallic surfaces | Alan R. Browne, Daniel J. Hart, Betsy Elzufon | 1993-08-03 |