Patents per Year
Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 8580076 | Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith | Alan F. Becknell, Thomas Buckley, Richard E. Pingree, Jr., Palanikumaran Sakthivel, Aseem K. Srivastava +1 more | 2013-11-12 | $9,816,000 |
| 7449416 | Apparatus and plasma ashing process for increasing photoresist removal rate | Alan F. Becknell, Philip Hammar | 2008-11-11 | $1,550,000 |
| 7163587 | Reactor assembly and processing method | David W. Kinnard | 2007-01-16 | $7,040,000 |
| 6897615 | Plasma process and apparatus | Alan C. Janos, Ivan L. Berry, III, Michael G. Ury | 2005-05-24 | $7,539,000 |