Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7821655 | In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint prediction | Montien Saubhayana | 2010-10-26 |
| 7709814 | Apparatus and process for treating dielectric materials | Carlo Waldfried, Christopher Garmer, Orlando Escorcia, Ivan L. Berry, III, Palani Sakthivel | 2010-05-04 |
| 7166963 | Electrodeless lamp for emitting ultraviolet and/or vacuum ultraviolet radiation | Malcolm Pack, Mohammad Kamarchi, Michael B. Colson | 2007-01-23 |
| 6987269 | Apparatus and process for measuring light intensities | Betty Zhang | 2006-01-17 |
| 6897615 | Plasma process and apparatus | David Ferris, Ivan L. Berry, III, Michael G. Ury | 2005-05-24 |
| 6803319 | Process for optically erasing charge buildup during fabrication of an integrated circuit | Anthony Sinnot, Ivan L. Berry, III, Kevin Alexander STEWART, Robert Douglas Mohondro | 2004-10-12 |
| 6664737 | Dielectric barrier discharge apparatus and process for treating a substrate | Ivan L. Berry, III, Michael B. Colson | 2003-12-16 |
| 6605484 | Process for optically erasing charge buildup during fabrication of an integrated circuit | Anthony Sinnot, Ivan L. Berry, III, Kevin Alexander STEWART, Robert Douglas Mohondro | 2003-08-12 |
| 6597003 | Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers | Daniel Richardson | 2003-07-22 |
| 6585908 | Shallow angle interference process and apparatus for determining real-time etching rate | Andre Cardoso | 2003-07-01 |
| 6547458 | Optimized optical system design for endpoint detection | Andre Cardoso, Daniel Richardson | 2003-04-15 |
| 5980638 | Double window exhaust arrangement for wafer plasma processor | — | 1999-11-09 |
| 4713208 | Spheromak reactor with poloidal flux-amplifying transformer | Harold P. Furth, Tadao Uyama, Masaaki Yamada | 1987-12-15 |
| 4687617 | Steady-state inductive spheromak operation | Stephen C. Jardin, Masaaki Yamada | 1987-08-18 |