Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969227 | Wafer transport apparatus | David W. Kinnard | 2005-11-29 |
| 6877946 | Wafer transport apparatus | David W. Kinnard | 2005-04-12 |
| 6782843 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | David W. Kinnard | 2004-08-31 |
| 6663333 | Wafer transport apparatus | David W. Kinnard | 2003-12-16 |
| 6635117 | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system | David W. Kinnard | 2003-10-21 |
| 6597003 | Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers | Alan C. Janos | 2003-07-22 |
| 6547458 | Optimized optical system design for endpoint detection | Alan C. Janos, Andre Cardoso | 2003-04-15 |
| 5655631 | Adjustable chock for radio-controlled model airplanes | — | 1997-08-12 |