MS

Montien Saubhayana

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
📍 Bangkok, TH: #327 of 889 inventorsTop 40%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7821655 In-situ absolute measurement process and apparatus for film thickness, film removal rate, and removal endpoint prediction Alan C. Janos 2010-10-26