Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580076 | Plasma apparatus, gas distribution assembly for a plasma apparatus and processes therewith | Alan F. Becknell, Thomas Buckley, David Ferris, Richard E. Pingree, Jr., Aseem K. Srivastava +1 more | 2013-11-12 |
| 8268181 | Plasma ashing apparatus and endpoint detection process | Aseem K. Srivastava, Thomas Buckley | 2012-09-18 |
| 7381651 | Processes for monitoring the levels of oxygen and/or nitrogen species in a substantially oxygen and nitrogen-free plasma ashing process | Thomas Buckley, Alan F. Becknell | 2008-06-03 |
| 6082374 | Fluorine assisted stripping and residue removal in sapphire downstream plasma asher | Maria Huffman, Teresa Zimmerman, Thomas H. Noble | 2000-07-04 |