Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6082374 | Fluorine assisted stripping and residue removal in sapphire downstream plasma asher | Maria Huffman, Palanikumaran Sakthivel, Thomas H. Noble | 2000-07-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6082374 | Fluorine assisted stripping and residue removal in sapphire downstream plasma asher | Maria Huffman, Palanikumaran Sakthivel, Thomas H. Noble | 2000-07-04 |