| 6432282 |
Method and apparatus for supplying electricity uniformly to a workpiece |
Shamouil Shamouilian, Anada H. Kumar, Donald Olgado, Joseph Stevens, Ricardo Leon |
2002-08-13 |
| 6278600 |
Electrostatic chuck with improved temperature control and puncture resistance |
Shamouil Shamouilian, Arnold Kholodenko, Semyon L. Kats, Semyon Sherstinsky, Surinder Bedi |
2001-08-21 |
| 6094334 |
Polymer chuck with heater and method of manufacture |
Surinder Bedi, Shamouil Shamouilian, Syed H. Askari, Arnold Kholodenko, Alexander Veytser +2 more |
2000-07-25 |
| 6055150 |
Multi-electrode electrostatic chuck having fuses in hollow cavities |
Mark Contreras, Anand KUMAR, Shamouil Shamouilian, You Wang, Surinder Bedi |
2000-04-25 |
| 5986875 |
Puncture resistant electrostatic chuck |
Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more |
1999-11-16 |
| 5729423 |
Puncture resistant electrostatic chuck |
Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more |
1998-03-17 |
