Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432282 | Method and apparatus for supplying electricity uniformly to a workpiece | Shamouil Shamouilian, Anada H. Kumar, Donald Olgado, Joseph Stevens, Ricardo Leon | 2002-08-13 |
| 6278600 | Electrostatic chuck with improved temperature control and puncture resistance | Shamouil Shamouilian, Arnold Kholodenko, Semyon L. Kats, Semyon Sherstinsky, Surinder Bedi | 2001-08-21 |
| 6094334 | Polymer chuck with heater and method of manufacture | Surinder Bedi, Shamouil Shamouilian, Syed H. Askari, Arnold Kholodenko, Alexander Veytser +2 more | 2000-07-25 |
| 6055150 | Multi-electrode electrostatic chuck having fuses in hollow cavities | Mark Contreras, Anand KUMAR, Shamouil Shamouilian, You Wang, Surinder Bedi | 2000-04-25 |
| 5986875 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more | 1999-11-16 |
| 5729423 | Puncture resistant electrostatic chuck | Arik Donde, Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon +2 more | 1998-03-17 |