Puncture resistant electrostatic chuck

Assignee

• Applied Materials

Inventors

• Arik Donde (12 patents)
• Hyman J. Levinstein (29 patents)
• Robert Wu (28 patents)
• Andreas Hegedus (59 patents)
• Edwin C. Weldon (11 patents)
• Shamouil Shamouilian (68 patents)
• Jon Clinton (6 patents)
• Surinder Bedi (14 patents)

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