Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7528349 | Temperature stabilization for substrate processing | Yehiel Gotkis, Vincenzo Lordi | 2009-05-05 |
| 6721162 | Electrostatic chuck having composite dielectric layer and method of manufacture | Edwin C. Weldon, Kenneth S. Collins, Brian Lue, Dan Maydan, Robert Steger +8 more | 2004-04-13 |
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Brian Lue, Dan Maydan, Robert Steger +8 more | 2002-07-02 |
| 6405423 | Method for producing vacuum processing chambers | — | 2002-06-18 |
| 6182851 | Vacuum processing chambers and method for producing | — | 2001-02-06 |
| 6108189 | Electrostatic chuck having improved gas conduits | Edwin C. Weldon, Kenneth S. Collins, Brian Lue, Dan Maydan, Robert Steger +8 more | 2000-08-22 |
| 5986875 | Puncture resistant electrostatic chuck | Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon, Shamouil Shamouilian +2 more | 1999-11-16 |
| 5910338 | Surface preparation to enhance adhesion of a dielectric layer | — | 1999-06-08 |
| 5904776 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Dan Maydan, Robert Steger, Edwin C. Weldon, Brian Lue, Timothy Dyer | 1999-05-18 |
| 5788453 | Piezoelectric wafer gripping system for robot blades | Herzel Laor | 1998-08-04 |
| 5729423 | Puncture resistant electrostatic chuck | Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon, Shamouil Shamouilian +2 more | 1998-03-17 |
| 5720818 | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Dan Maydan, Robert Steger, Edwin C. Weldon, Brian Lue, Timothy Dyer | 1998-02-24 |