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Temperature stabilization for substrate processing |
Yehiel Gotkis, Vincenzo Lordi |
2009-05-05 |
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Electrostatic chuck having composite dielectric layer and method of manufacture |
Edwin C. Weldon, Kenneth S. Collins, Brian Lue, Dan Maydan, Robert Steger +8 more |
2004-04-13 |
| 6414834 |
Dielectric covered electrostatic chuck |
Edwin C. Weldon, Kenneth S. Collins, Brian Lue, Dan Maydan, Robert Steger +8 more |
2002-07-02 |
| 6405423 |
Method for producing vacuum processing chambers |
— |
2002-06-18 |
| 6182851 |
Vacuum processing chambers and method for producing |
— |
2001-02-06 |
| 6108189 |
Electrostatic chuck having improved gas conduits |
Edwin C. Weldon, Kenneth S. Collins, Brian Lue, Dan Maydan, Robert Steger +8 more |
2000-08-22 |
| 5986875 |
Puncture resistant electrostatic chuck |
Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon, Shamouil Shamouilian +2 more |
1999-11-16 |
| 5910338 |
Surface preparation to enhance adhesion of a dielectric layer |
— |
1999-06-08 |
| 5904776 |
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck |
Dan Maydan, Robert Steger, Edwin C. Weldon, Brian Lue, Timothy Dyer |
1999-05-18 |
| 5788453 |
Piezoelectric wafer gripping system for robot blades |
Herzel Laor |
1998-08-04 |
| 5729423 |
Puncture resistant electrostatic chuck |
Hyman J. Levinstein, Robert Wu, Andreas Hegedus, Edwin C. Weldon, Shamouil Shamouilian +2 more |
1998-03-17 |
| 5720818 |
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck |
Dan Maydan, Robert Steger, Edwin C. Weldon, Brian Lue, Timothy Dyer |
1998-02-24 |
