Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Electrostatic chuck having composite dielectric layer and method of manufacture

Electrostatic chuck having composite dielectric layer and method of manufacture

US Patent 6721162 · Granted Apr 13, 2004

Estimated economic value: $29,327,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Plasma chamber with multiphase rotating independent gas cross-flow with reduced 2025
Substrate support gap pumping to prevent glow discharge and light-up2025
Carrier head membrane with regions of different roughness2024
Continuous liner for use in a processing chamber2024
Shingled solar cell module2024
Shingled solar cell module2024
Symmetric VHF source for a plasma reactor2024
Window in thin polishing pad2023
Multiple zone heater2023
Continuous liner for use in a processing chamber2023
Method of making carrier head membrane with regions of different roughness2023
Semiconductor substrate support with multiple electrodes and method for making s2023