| 8607731 |
Cathode with inner and outer electrodes at different heights |
Daniel J. Hoffman, Douglas A. Buchberger, Jr., Dan Katz |
2013-12-17 |
| 8279577 |
Substrate support having fluid channel |
Andrew Nguyen, Wing Cheng, Hiroji Hanawa, Kartik Ramaswamy, Yan Ye +4 more |
2012-10-02 |
| 7768765 |
Substrate support having heat transfer system |
Andrew Nguyen, Wing Cheng, Hiroji Hanawa, Kartik Ramaswamy, Yan Ye +4 more |
2010-08-03 |
| 7672110 |
Electrostatic chuck having textured contact surface |
Jennifer Y. Sun, James Dempster, Allen Fox |
2010-03-02 |
| 7479464 |
Low temperature aerosol deposition of a plasma resistive layer |
Jennifer Y. Sun, Elmira Ryabova, Senh Thach, Xi Zhu |
2009-01-20 |
| 7221553 |
Substrate support having heat transfer system |
Andrew Nguyen, Wing Cheng, Hiroji Hanawa, Kartik Ramaswamy, Yan Ye +4 more |
2007-05-22 |
| 6721162 |
Electrostatic chuck having composite dielectric layer and method of manufacture |
Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more |
2004-04-13 |
| 6538872 |
Electrostatic chuck having heater and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more |
2003-03-25 |
| 6490145 |
Substrate support pedestal |
Arnold Kholodenko, You Wang, Tony Kaushal |
2002-12-03 |
| 6490146 |
Electrostatic chuck bonded to base with a bond layer and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more |
2002-12-03 |
| 6462928 |
Electrostatic chuck having improved electrical connector and method |
Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Alexander Veytser +4 more |
2002-10-08 |
| 6414834 |
Dielectric covered electrostatic chuck |
Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more |
2002-07-02 |
| 6310755 |
Electrostatic chuck having gas cavity and method |
Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Alexander Veytser +4 more |
2001-10-30 |
| 6278600 |
Electrostatic chuck with improved temperature control and puncture resistance |
Shamouil Shamouilian, Arnold Kholodenko, Semyon Sherstinsky, Jon Clinton, Surinder Bedi |
2001-08-21 |
| 6151203 |
Connectors for an electrostatic chuck and combination thereof |
Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Dennis S. Grimard, Liang Wang +4 more |
2000-11-21 |
| 6108189 |
Electrostatic chuck having improved gas conduits |
Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more |
2000-08-22 |
