| 8292697 |
Method for manufacturing a hybrid composite wafer carrier for wet clean equipment |
Arnold Kholodenko |
2012-10-23 |
| 8279577 |
Substrate support having fluid channel |
Andrew Nguyen, Hiroji Hanawa, Semyon L. Kats, Kartik Ramaswamy, Yan Ye +4 more |
2012-10-02 |
| 8146902 |
Hybrid composite wafer carrier for wet clean equipment |
Arnold Kholodenko |
2012-04-03 |
| 7768765 |
Substrate support having heat transfer system |
Andrew Nguyen, Hiroji Hanawa, Semyon L. Kats, Kartik Ramaswamy, Yan Ye +4 more |
2010-08-03 |
| 7221553 |
Substrate support having heat transfer system |
Andrew Nguyen, Hiroji Hanawa, Semyon L. Kats, Kartik Ramaswamy, Yan Ye +4 more |
2007-05-22 |
| 6795292 |
Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber |
Dennis S. Grimard, Arnold Kholodenko, Alex Veytser, Senh Thach |
2004-09-21 |
| 6736668 |
High temperature electrical connector |
Arnold Kholodenko, Senh Thach, Alvin Lau, Dennis S. Grimard |
2004-05-18 |
| 6676760 |
Process chamber having multiple gas distributors and method |
Arnold Kholodenko, Dan Katz |
2004-01-13 |
| 6583980 |
Substrate support tolerant to thermal expansion stresses |
You Wang, Arnold Kholodenko, Shamouil Shamouilian, Alexander Veytser |
2003-06-24 |
| 6572814 |
Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas |
Shamouil Shamoulian, Arnold Kholodenko, Senh Thach |
2003-06-03 |
| 6538872 |
Electrostatic chuck having heater and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more |
2003-03-25 |
| 6503368 |
Substrate support having bonded sections and method |
Arnold Kholodenko, Vijay D. Parkhe, Shamouil Shamouilian, You Wang, Alexander Veytser |
2003-01-07 |
| 6490146 |
Electrostatic chuck bonded to base with a bond layer and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more |
2002-12-03 |
| 6462928 |
Electrostatic chuck having improved electrical connector and method |
Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Alexander Veytser +4 more |
2002-10-08 |
| 6310755 |
Electrostatic chuck having gas cavity and method |
Arnold Kholodenko, Shamouil Shamouilian, You Wang, Alexander Veytser, Surinder Bedi +4 more |
2001-10-30 |
