Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8292697 | Method for manufacturing a hybrid composite wafer carrier for wet clean equipment | Arnold Kholodenko | 2012-10-23 |
| 8279577 | Substrate support having fluid channel | Andrew Nguyen, Hiroji Hanawa, Semyon L. Kats, Kartik Ramaswamy, Yan Ye +4 more | 2012-10-02 |
| 8146902 | Hybrid composite wafer carrier for wet clean equipment | Arnold Kholodenko | 2012-04-03 |
| 7768765 | Substrate support having heat transfer system | Andrew Nguyen, Hiroji Hanawa, Semyon L. Kats, Kartik Ramaswamy, Yan Ye +4 more | 2010-08-03 |
| 7221553 | Substrate support having heat transfer system | Andrew Nguyen, Hiroji Hanawa, Semyon L. Kats, Kartik Ramaswamy, Yan Ye +4 more | 2007-05-22 |
| 6795292 | Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber | Dennis S. Grimard, Arnold Kholodenko, Alex Veytser, Senh Thach | 2004-09-21 |
| 6736668 | High temperature electrical connector | Arnold Kholodenko, Senh Thach, Alvin Lau, Dennis S. Grimard | 2004-05-18 |
| 6676760 | Process chamber having multiple gas distributors and method | Arnold Kholodenko, Dan Katz | 2004-01-13 |
| 6583980 | Substrate support tolerant to thermal expansion stresses | You Wang, Arnold Kholodenko, Shamouil Shamouilian, Alexander Veytser | 2003-06-24 |
| 6572814 | Method of fabricating a semiconductor wafer support chuck apparatus having small diameter gas distribution ports for distributing a heat transfer gas | Shamouil Shamoulian, Arnold Kholodenko, Senh Thach | 2003-06-03 |
| 6538872 | Electrostatic chuck having heater and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2003-03-25 |
| 6503368 | Substrate support having bonded sections and method | Arnold Kholodenko, Vijay D. Parkhe, Shamouil Shamouilian, You Wang, Alexander Veytser | 2003-01-07 |
| 6490146 | Electrostatic chuck bonded to base with a bond layer and method | You Wang, Shamouil Shamouilian, Arnold Kholodenko, Alexander Veytser, Surinder Bedi +4 more | 2002-12-03 |
| 6462928 | Electrostatic chuck having improved electrical connector and method | Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Alexander Veytser +4 more | 2002-10-08 |
| 6310755 | Electrostatic chuck having gas cavity and method | Arnold Kholodenko, Shamouil Shamouilian, You Wang, Alexander Veytser, Surinder Bedi +4 more | 2001-10-30 |