| 11823890 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2023-11-21 |
| 11712745 |
Semiconductor substrate support with multiple electrodes and method for making same |
Michael Parker, Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster +1 more |
2023-08-01 |
| 11495450 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2022-11-08 |
| 11091397 |
Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2021-08-17 |
| 10991616 |
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2021-04-27 |
| 10646941 |
Method for manufacture of a multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2020-05-12 |
| 10287215 |
Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2019-05-14 |
| 10213858 |
Multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2019-02-26 |
| 10153183 |
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2018-12-11 |
| 9999947 |
Method for repairing heaters and chucks used in semiconductor processing |
Brent Donald Alfred Elliot, Frank Balma, Michael Parker, JEFF CUNHA |
2018-06-19 |
| 9984866 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2018-05-29 |
| 9624137 |
Low temperature method for hermetically joining non-diffusing ceramic materials |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2017-04-18 |
| 9556074 |
Method for manufacture of a multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2017-01-31 |
| 9315424 |
Multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2016-04-19 |
| 8932690 |
Plate and shaft device |
Alfred Grant Elliot, Dennis George Rex, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster |
2015-01-13 |
| 8789743 |
Hermetically joined ceramic assemblies and low temperature method for hermetically joining ceramic materials |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex |
2014-07-29 |
| 7098428 |
System and method for an improved susceptor |
Brent Donald Alfred Elliot, Frank Balma, Benjamin D. Mosser, Harold Mortensen |
2006-08-29 |
| 6721162 |
Electrostatic chuck having composite dielectric layer and method of manufacture |
Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more |
2004-04-13 |
| 6583980 |
Substrate support tolerant to thermal expansion stresses |
You Wang, Arnold Kholodenko, Shamouil Shamouilian, Wing Cheng |
2003-06-24 |
| 6538872 |
Electrostatic chuck having heater and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more |
2003-03-25 |
| 6503368 |
Substrate support having bonded sections and method |
Arnold Kholodenko, Vijay D. Parkhe, Shamouil Shamouilian, You Wang, Wing Cheng |
2003-01-07 |
| 6494958 |
Plasma chamber support with coupled electrode |
Shamouil Shamouilian, Jon McChesney, Kwok Manus Wong, Liang Wang, Dennis S. Grimard |
2002-12-17 |
| 6490146 |
Electrostatic chuck bonded to base with a bond layer and method |
You Wang, Shamouil Shamouilian, Arnold Kholodenko, Surinder Bedi, Kadthala Ramaya Narendrnath +4 more |
2002-12-03 |
| 6478924 |
Plasma chamber support having dual electrodes |
Shamouil Shamouilian, Arnold Kholodenko, Kwok Manus Wong, Liang Wang, Dennis S. Grimard |
2002-11-12 |
| 6462928 |
Electrostatic chuck having improved electrical connector and method |
Shamouil Shamouilian, You Wang, Surinder Bedi, Arnold Kholodenko, Kadthala Ramaya Narendrnath +4 more |
2002-10-08 |
