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Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2023-11-21 |
| 11712745 |
Semiconductor substrate support with multiple electrodes and method for making same |
Michael Parker, Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex +1 more |
2023-08-01 |
| 11495450 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2022-11-08 |
| 11091397 |
Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2021-08-17 |
| 10991616 |
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2021-04-27 |
| 10646941 |
Method for manufacture of a multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2020-05-12 |
| 10287215 |
Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2019-05-14 |
| 10213858 |
Multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2019-02-26 |
| 10153183 |
High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2018-12-11 |
| 9984866 |
Multiple zone heater |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2018-05-29 |
| 9624137 |
Low temperature method for hermetically joining non-diffusing ceramic materials |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2017-04-18 |
| 9556074 |
Method for manufacture of a multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2017-01-31 |
| 9315424 |
Multi-layer plate device |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2016-04-19 |
| 8932690 |
Plate and shaft device |
Alfred Grant Elliot, Dennis George Rex, Alexander Veytser, Brent Donald Alfred Elliot, Frank Balma |
2015-01-13 |
| 8789743 |
Hermetically joined ceramic assemblies and low temperature method for hermetically joining ceramic materials |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veytser |
2014-07-29 |
| 8684256 |
Method for hermetically joining plate and shaft devices including ceramic materials used in semiconductor processing |
Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Dennis George Rex, Alexander Veyster |
2014-04-01 |
| 7472372 |
Fast image simulation for photolithography |
Peter Fiekowsky |
2008-12-30 |
| 6302141 |
Building blocks for integrated gas panel |
Jeffrey R. Markulec, Dennis George Rex, Brent Donald Alfred Elliot |
2001-10-16 |
| 6231260 |
Mounting plane for integrated gas panel |
Jeffrey R. Markulec, Dennis George Rex, Brent Donald Alfred Elliot |
2001-05-15 |
| 6158454 |
Sieve like structure for fluid flow through structural arrangement |
Michael J. Duret, Erin Martin Hasenkamp, Jeffrey R. Markulec, Dennis George Rex |
2000-12-12 |
| 5836355 |
Building blocks for integrated gas panel |
Jeffrey R. Markulec, Dennis George Rex, Brent Donald Alfred Elliot |
1998-11-17 |