Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8684256 | Method for hermetically joining plate and shaft devices including ceramic materials used in semiconductor processing | Alfred Grant Elliot, Brent Donald Alfred Elliot, Frank Balma, Richard Erich Schuster, Dennis George Rex | 2014-04-01 |
| 6682603 | Substrate support with extended radio frequency electrode upper surface | Sudhir Gondhalekar, Dongqing Li, Canfeng Lai, Zhengquan Tan, Steve Kim | 2004-01-27 |