Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6414834 | Dielectric covered electrostatic chuck | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2002-07-02 |
| 6310755 | Electrostatic chuck having gas cavity and method | Arnold Kholodenko, Shamouil Shamouilian, You Wang, Wing Cheng, Surinder Bedi +4 more | 2001-10-30 |
| 6151203 | Connectors for an electrostatic chuck and combination thereof | Shamouil Shamouilian, Ananda H. Kumar, Arnold Kholodenko, Dennis S. Grimard, Liang Wang +4 more | 2000-11-21 |
| 6108189 | Electrostatic chuck having improved gas conduits | Edwin C. Weldon, Kenneth S. Collins, Arik Donde, Brian Lue, Dan Maydan +8 more | 2000-08-22 |
| 6094334 | Polymer chuck with heater and method of manufacture | Surinder Bedi, Shamouil Shamouilian, Syed H. Askari, Arnold Kholodenko, Jon Clinton +2 more | 2000-07-25 |
| 5885469 | Topographical structure of an electrostatic chuck and method of fabricating same | Arnold Kholodenko | 1999-03-23 |
| 5801915 | Electrostatic chuck having a unidirectionally conducting coupler layer | Arnold Kholodenko, Shamouil Shamouilian | 1998-09-01 |