Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Carrier head membrane with regions of different roughness

Carrier head membrane with regions of different roughness

US Patent 12172264 · Granted Dec 24, 2024

Estimated economic value: $95,614,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Window in thin polishing pad2023
Method of making carrier head membrane with regions of different roughness2023
Method of making carrier head membrane with regions of different roughness2023
Method of making carrier head membrane with regions of different roughness2023
3D printed chamber components configured for lower film stress and lower operati2023
Edge ring for a substrate processing chamber2022
Electrostatic chuck optimized for refurbishment2021
Window in thin polishing pad2021
Carrier head membrane with regions of different roughness2021
Carrier head membrane with regions of different roughness2021
Carrier head membrane with regions of different roughness2021
3D printed chamber components configured for lower film stress and lower operati2020