Semiconductor substrate support with multiple electrodes and method for making same

Assignee

• Watlow Electric Manufacturing

Inventors

• Michael Parker (18 patents)
• Alfred Grant Elliot (21 patents)
• Brent Donald Alfred Elliot (36 patents)
• Frank Balma (22 patents)
• Richard Erich Schuster (21 patents)
• Dennis George Rex (26 patents)
• Alexander Veytser (32 patents)

View full patent text on Google Patents →