Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12369228 | Method and system for providing variable ramp-down control for an electric heater | Brittany Phillips, Stanton Hopkins Breitlow | 2025-07-22 |
| 12225635 | Method and system for providing variable ramp-up control for an electric heater | Brittany Phillips, Stanton Hopkins Breitlow | 2025-02-11 |
| 12148650 | Thermal diffuser for a semiconductor wafer holder | Sanhong Zhang, Martin Wallinger, Blake Parkinson | 2024-11-19 |
| 12127310 | Multi-zone pedestal heater without vias | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2024-10-22 |
| 12046502 | Electrostatic puck and method of manufacture | Patrick Margavio, Kurt English | 2024-07-23 |
| 11895741 | Multi-zone pedestal heater having a routing layer | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2024-02-06 |
| 11751289 | Integrated heater and method of manufacture | Patrick Margavio, Kevin Smith | 2023-09-05 |
| 11515190 | Thermal diffuser for a semiconductor wafer holder | Sanhong Zhang, Martin Wallinger, Blake Parkinson | 2022-11-29 |
| 11382180 | Multi-zone pedestal heater having a routing layer | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2022-07-05 |
| 11343879 | Multi-zone pedestal heater without vias | Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips, Ken Ames +2 more | 2022-05-24 |
| 11304265 | Layered heater system having conductive overlays | Elias Russegger, Gerhard Schefbanker, Martin Wallinger | 2022-04-12 |
| 11191129 | Layered heater system having conductive overlays | Elias Russegger, Gerhard Schefbanker, Martin Wallinger | 2021-11-30 |
| 11133201 | High definition heater system having a fluid medium | Kevin Smith, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati +5 more | 2021-09-28 |
| 11083050 | Integrated heater and method of manufacture | Patrick Margavio, Kevin Smith | 2021-08-03 |
| 10734256 | High definition heater and method of operation | Kevin Smith, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati, Jacob Lindley +4 more | 2020-08-04 |
| 10483147 | Dual-purpose vias for use in ceramic pedestals | Mohammad Nosrati | 2019-11-19 |
| 10361103 | High definition heater system having a fluid medium | Kevin Smith, Ray Alan Derler, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati +5 more | 2019-07-23 |
| 10361019 | Moisture resistant layered sleeve heater and method of manufacture thereof | Elias Russegger, Gerhard Schefbanker, Gernot Antosch, Wolfgang Poeschl, Martin Wallinger +3 more | 2019-07-23 |
| 10314113 | Layered heater system having conductive overlays | Elias Russegger, Gerhard Schefbanker, Martin Wallinger | 2019-06-04 |
| 10236103 | Moisture resistant layered sleeve heater and method of manufacture thereof | Elias Russegger, Gerhard Schefbanker, Gernot Antosch, Wolfgang Poeschl, Martin Wallinger +3 more | 2019-03-19 |
| 10159114 | Layered heater system with honeycomb core structure | Mark D. Everly, Cal T. Swanson, Tom Kupiszewski, Chris Lanham, Mike Stewart | 2018-12-18 |
| 10159116 | Modular layered heater system | — | 2018-12-18 |
| 10154542 | Composite device with cylindrical anisotropic thermal conductivity | Sanhong Zhang, Kevin Smith | 2018-12-11 |
| 10049903 | Method of manufacturing a high definition heater system | Allen Boldt, Janet Lea Smith, Cal T. Swanson, Mohammad Nosrati, Kevin Smith | 2018-08-14 |
| 10043685 | High definition heater and method of operation | Kevin Smith, Cal T. Swanson, Philip S. Schmidt, Mohammad Nosrati, Jacob Lindley +4 more | 2018-08-07 |