Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12127310 | Multi-zone pedestal heater without vias | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2024-10-22 |
| 12046502 | Electrostatic puck and method of manufacture | Kurt English, Kevin Ptasienski | 2024-07-23 |
| 11943845 | Ceramic heater and method of forming using transient liquid phase bonding | Todd Brooke, Kurt English | 2024-03-26 |
| 11895741 | Multi-zone pedestal heater having a routing layer | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2024-02-06 |
| 11751289 | Integrated heater and method of manufacture | Kevin Ptasienski, Kevin Smith | 2023-09-05 |
| 11622421 | Electric heaters with low drift resistance feedback | Jeremy Ohse, Jake Spooler, Philip S. Schmidt, Melissa Lanham, Paul Valachovic +2 more | 2023-04-04 |
| 11382180 | Multi-zone pedestal heater having a routing layer | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2022-07-05 |
| 11343879 | Multi-zone pedestal heater without vias | Kevin Ptasienski, Stanton Hopkins Breitlow, Mohammad Nosrati, Kevin Smith, Brittany Phillips +2 more | 2022-05-24 |
| 11340121 | Heater element having targeted decreasing temperature resistance characteristics | Mark D. Everly, Jeremy Ohse, Sanhong Zhang | 2022-05-24 |
| 11083050 | Integrated heater and method of manufacture | Kevin Ptasienski, Kevin Smith | 2021-08-03 |
| 10882130 | Ceramic-aluminum assembly with bonding trenches | Kurt English, Jacob Wilson, Miranda Pizzella, Todd Brooke | 2021-01-05 |
| 10760465 | Heater element having targeted decreasing temperature resistance characteristics | Mark D. Everly, Jeremy Ohse, Sanhong Zhang | 2020-09-01 |
| 10681778 | Integrated heater and method of manufacture | Mohammad Nosrati, Kurt English, Kevin Smith | 2020-06-09 |
| 10448458 | Electric heaters with low drift resistance feedback | Jeremy Ohse, Jake Spooler, Phillip S. Schmidt, Melissa Lanham, Paul Valachovic +2 more | 2019-10-15 |